A High Resolution Differential Mode-localized MEMS Accelerometer

Published in IEEE Journal of Microelectromechanical Systems, 2019


A novel differential configuration of a highresolution mode-localized resonant SOI-MEMS accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a bias-stability of 2.96µg is demonstrated. A minimum noise floor of 3µg/Hz1/2 is shown for device operation in an optimum working region. A large bandwidth of 350Hz is reported and methods to electronically tune the working bandwidth are described. These results benchmark mode-localized accelerometers favourably with respect to other high-end low-g commercial MEMS accelerometers.
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