Talk-2 on Recent Progress of MEMS Sensors based on Coupled Resonators


In this talk, recent progress on MEMS sensors based on coupled resonators are dicussed. In particular, the concept and technical advantages (in terms of improved sensitivity and long-term stability) of MEMS mode-localized sensors are presented. Nonlinear effects and modal interactions are proposed to enhance the sensor performance. Future outlook in this area is also discussed.